FR-Education tool is controlled through FR-Monitor™ performing the spectral data acquisition and analysis. A material database is included and can be easily expanded by the user. The entire system (hardware – software) is shipped ready for measurements. The only additional part needed is a PC with a free USB port. The system can be easily used by anyone with basic computer skills without any deep knowledge of optics.
The FR-Education tool can handle layer stacks consisted of numerous layers and two quantities can be calculated simultaneously e.g. thicknesses of two films, thickness and n & k of one film.
FR-Education is a simplified version of FR-Basic with case Type A, without a cover top. In this configuration the spectrometer has 650 pixels, and thus the film thickness range can be measured is limited. FR-Education comes with a Reflection Probe, two (2) fibers, and a film/cuvette holder for Absorbance/Transmittance measurements in standard 1cm cuvettes and films.
A special holder accommodating two reference samples (silicon and aluminum) and Si wafer pieces with various films (SiO2, Si3N4/SiO2, poly-Si/Si3N4/SiO2) is provided as a reference, while optical absorbance standards can be provided on request.
- Non-Metal Films
- Optical Coating
Thickness: 100nm – 30μm
Wavelength range: 360-1000nm
Detector: 650 pixels Si CCD array, 12Bit A/D resolution
Accuracy: better than 1 %
Spot size: >0.5mm
Light Source: Regulated Tungsten – Halogen (360nm – 2000nm)
Sample size: 10 – 150mm, irregular shape
Computer requirements: PC with Windows XP/Vista/7 32/64bit and a USB port available
Power requirements: 110V/230V AC
Dimensions (WxLxH): 32cm x 36cm x 18cm**
* Specifications are subject to change without any notice.
** Without the reflactance holder.